Discussion Group Advanced Thermal Control (Thermomanagement)

IBS Precision Engineering

The first German Meeting of the Discussion Group Advanced Thermal Control takes place in Frankfurt on 22nd of February 2018 and is open exclusive to VDMA (EMINT) members.

In the development of precision systems and machines, thermal effects can play a dominant role. As accuracy, productivity and optimization demands increase, the challenge to further improve performance from the perspective of improved thermal control is of growing importance to various markets, including printing, medical systems, aerospace, automotive and semiconductor manufacturing systems.

In 2015 a Dutch consortium has been formed to advance the theoretical and applied approaches to design, simulation, measurement and compensation techniques essential for the development of precision modules/systems subject to internal or external thermal loads. The focus is on technical strategies and solutions to enable the next generation of industry capability.

At the core of the consortium is a group of leading industry from the Dutch High Tech Sector. It is a unique cross-sectorial partnership; addressing a sweep of key end markets and the value chain from SME through to OEM. For the first time, a leading group of industrial partners working in the field (ASML, FEI Electron Optics, Philips Electronics Nederland, IBS Precision Engineering, Segula Technologies Nederland and VDL Enabling Technologies) have come together to conduct shared development in a new innovation forum. The partnership has been formed to drive a common research agenda; driven by the diverse markets served but where common challenges are emerging.

So, we as VDMA EMINT want to bring this topic to our members.

Our speakers:

Max van der Kolk, Daming Lou and Enzo Evers are PhD students supported by the Advanced Thermal Control Consortium. Joris van den Boom, Thermal Engineer at ASML, has many years of industrial experience in a wide range of thermal control applications. He also has a formal role as thermal control competence leader within ASML. Together they will provide an outstanding overview of the latest developments in this field.

Key Themes

The following key topics are addressed by research within the Dutch consortium:

Deformation caused by thermal-transients is an important issue in the performance of high-precision machines. For precision machine applications, such as lithography systems, specifications become tighter and thermal loads more critical. The task is to develop efficient and effective optimization tools to improve transient thermo-mechanics, by improving:

•           The geometry of the structure including position of coolant.

•           The heat transfer coefficient of coolant.

•           The material properties, including material combinations

This project is focussed on the separation of complex thermal and thermo-elastic dynamical systems into distinct modules. It aims to address (non-linear) thermally induced expansion and deformation effects of structures into simplified models. These models are required to be physically meaningful and accurate in the prediction of thermal and elastic properties of structures. They must take parameter variations (e.g. material properties, geometries) into account. Reduced models will facilitate design decisions on the basis of simplified models.

There is a clear need for competence development in thermal control systems for precision industrial applications. Compared to modelling and control for positioning problems, advanced thermal modelling and control has received considerably less attention so far. However, errors due to thermal effects become increasingly significant and so advanced techniques for thermal modelling and control becomes increasingly important. This goal of this PhD project is to develop advanced methods for experimental modelling (i.e. identification) and feedback control for thermal problems. Current concepts developed for advanced position control may be re- used and tailor-made to advanced thermal modelling and control. That is, the basic system theory is available to a great extent, but must be re-considered and modified to thermal problems. Fundamental differences in the physics of dynamics of mechanical vs. thermal systems set the challenge. The differences in time scales; variances in the combination of spectral contents of disturbances and the relevant frequency range of the system dynamics make this a non-trivial problem.

For further information about the event in Frankfurt and Program details please refer to the flyer below.